@article{张朝辉;杜永平;常秋英;雒建斌_18,
author = {[张朝辉;杜永平;常秋英;雒建斌]},
title = {化学机械抛光中抛光垫作用分析},
publisher = {星空电竞app2026最新版学报},
year = {2007},
journal = {星空电竞app2026最新版学报},
volume = {31},
number = {1},
eid = {18},
pages = {18-21},
keywords = {化学机械抛光;抛光垫;抛光液;流动模型;粗糙度;压力波动},
url = https://jdxb.bjtu.edu.cn/CN/abstract/article_1069.shtml
}